Classic Vacuum System Solutions - Pfeiffer Vacuum

The systems can be equipped for the following processes: High vacuum evaporation processes. Sputtering processes. Plasma processes (pre-treatment). Everything from one source ... (Turbo-, cryo- or oil diffusion pumps). Vacuum chambers coolable and .... RF and DC sputter cathodes (0.3 – 10 kW). Glow discharge units....

Untitled - Kurt J. Lesker Company

RF or DC operation. • Direct gas injection. • Monitor mounts for reactive sputtering applications. Designed For Your Process. Our TORUS® sputter sources are used .... Vacuum Greases, Sealants, & Solvents. • Pump Oil with R/O Additives. • Silicon Diffusion Pump Oils. • Pump Oil Recycling. Pressure Measurement. • Analog ......

Is it possible to do RF sputtering in a vacuum chamber having...

I want to deposit metal oxides like Al2O3 and ZrO2 using rf sputtering. I can't afford expensive vacuum pumps like oil diffusion pump and turbo molecular pump to my sputtering vacuum chamber. I had to go with a simple rotary pump only. I could hardly find any thin film deposition in such a low vacuum conditions however I ......

Thin Film Deposition

1) Oil diffusion pumps (gas transfer). 10-3 to 10-10 torr. 2) Turbomolecular pumps (gas transfer). 10-4 to 10-10 torr. 3) Gas capture pumps ion pumps must operate in .... Magnetron Sputter Deposition. ❖ Use with DC or RF. • High sputtering efficiency increase ionization of Ar. – Why? Higher sputter rates at lower Ar pressures....

Design of D.C. planer magnetron sputter for preparing copper-oxide ...

system pumped by a mechanical pump to a base pressure of 10-3 mbar, after which, it was pumped by oil diffusion pump to a base pressure of 10-5 mbar. The films were coated using dc magnetron sputtering system, with a 300 lit /sec diffusion pump and 200 lit /min rotary vacuum pump combination. The system gives an....

Mini Magnetron Sputtering System - Bridge Technology

Download brochure for mini-magnetron sputtering system ... 1) Vacuum pumps. Oil rotary pump (150 l/min) 1set, Oil Diffusion pump (215 l/sec) 1set. 2) Vacuum valves and pumping lines. NW25, Right angle valve for Roughing pumping; Venting ... 2 kW (800V – 2.5A), DC Sputtering power supply, 1set; cable : M-N type. 4....

vac equipmnt brochure - Mansha Vacuum Equipments Pvt. Ltd.

SPUTTERING-. SYSTEMS. PULSED). LASER. DEPOSITION. SYSTEM. Vacuum pumping systems, Diffusion pump/Turbopump based with oil filled /oil free backing ... provided to minimize the back-streaming of oil wapors and also ... Magnetron sputtering, DC/RF is an established process for the deposition of a wide range....

Rf Dc Sputtering System, Pvd Deposition Systems - Scientific ...

Scientific & Analytical Instruments offering Rf Dc Sputtering System, Pvd Deposition Systems in New Delhi, Delhi. ... and Cryo; Pumps Pumping System: Oil Rotary Pump, Diffusion Pump, Roughing & Backing Valve, Butterfly Valve, Liquid Nitrogen Trap, Pirani & Penning Guages to measure Vacuum upto 10-6 mbar vacuum....

Diffusion Pump - Mansha Vacuum Equipments

Standard Size, 3", 4", 6". Pumping Speed (Lit/Sec), ≤ 250 lps, ≤ 285 lps, ≤ 750 lps. Ultimate Vacuum with recommended fluid, ≤ 1 x 10-6 mb, ≤ 1 x 10-6 mb, ≤ 1 x 10-6 mb. Critical Backing Pressure(mbar), 0.1, 0.1, 0.1. Recommended Backing Pump, 100 Lpm, 250 Lpm, 500 Lpm. Recommended Fluid, Silicon Oil / DC ......

Scientific & Analytical Instruments - RF & DC Sputtering System

Vacuum Chamber is provided with 2-3 Nos. view Ports for monitoring of process. The chamber is Helium Leak Tested using Helium Leak Detector to an individual leak rate of 1 x 10-9 m.bar ltrs/sec. RF & DC Sputtering System. Pumping System: Oil Rotary Pump, Diffusion Pump, Roughing & Backing Valve, Butterfly Valve, ......

Design of D.C. planer magnetron sputter for preparing copper-oxide ...

system pumped by a mechanical pump to a base pressure of 10-3 mbar, after which, it was pumped by oil diffusion pump to a base pressure of 10-5 mbar. The films were coated using dc magnetron sputtering system, with a 300 lit /sec diffusion pump and 200 lit /min rotary vacuum pump combination. The system gives an....

Rf Dc Sputtering System, Pvd Deposition Systems - Scientific ...

Scientific & Analytical Instruments offering Rf Dc Sputtering System, Pvd Deposition Systems in New Delhi, Delhi. ... and Cryo; Pumps Pumping System: Oil Rotary Pump, Diffusion Pump, Roughing & Backing Valve, Butterfly Valve, Liquid Nitrogen Trap, Pirani & Penning Guages to measure Vacuum upto 10-6 mbar vacuum....

Is it possible to do RF sputtering in a vacuum chamber having...

I want to deposit metal oxides like Al2O3 and ZrO2 using rf sputtering. I can't afford expensive vacuum pumps like oil diffusion pump and turbo molecular pump to my sputtering vacuum chamber. I had to go with a simple rotary pump only. I could hardly find any thin film deposition in such a low vacuum conditions however I ......

Thin Film Deposition

1) Oil diffusion pumps (gas transfer). 10-3 to 10-10 torr. 2) Turbomolecular pumps (gas transfer). 10-4 to 10-10 torr. 3) Gas capture pumps ion pumps must operate in .... Magnetron Sputter Deposition. ❖ Use with DC or RF. • High sputtering efficiency increase ionization of Ar. – Why? Higher sputter rates at lower Ar pressures....

Classic Vacuum System Solutions - Pfeiffer Vacuum

The systems can be equipped for the following processes: High vacuum evaporation processes. Sputtering processes. Plasma processes (pre-treatment). Everything from one source ... (Turbo-, cryo- or oil diffusion pumps). Vacuum chambers coolable and .... RF and DC sputter cathodes (0.3 – 10 kW). Glow discharge units....

Untitled - Kurt J. Lesker Company

RF or DC operation. • Direct gas injection. • Monitor mounts for reactive sputtering applications. Designed For Your Process. Our TORUS® sputter sources are used .... Vacuum Greases, Sealants, & Solvents. • Pump Oil with R/O Additives. • Silicon Diffusion Pump Oils. • Pump Oil Recycling. Pressure Measurement. • Analog ......

vac equipmnt brochure - Mansha Vacuum Equipments Pvt. Ltd.

SPUTTERING-. SYSTEMS. PULSED). LASER. DEPOSITION. SYSTEM. Vacuum pumping systems, Diffusion pump/Turbopump based with oil filled /oil free backing ... provided to minimize the back-streaming of oil wapors and also ... Magnetron sputtering, DC/RF is an established process for the deposition of a wide range....

High frequency Sputtering System > RFS-201 > small vacuum systems

Main pump. Oil diffusion pump (Water cooling) 150L/sec. Liquid Nitrogen trap. Option. Backing pump. Oil rotary pump 100L/min. Oil mist trap. Oil mist trap OMT- 100A. Operation system. Main valve. Clapper valve. Sub valve. Three way valve. Automatic leak valve. Option. Control. Manual control. Control system. RF power  ......

Mini Magnetron Sputtering System - Bridge Technology

Download brochure for mini-magnetron sputtering system ... 1) Vacuum pumps. Oil rotary pump (150 l/min) 1set, Oil Diffusion pump (215 l/sec) 1set. 2) Vacuum valves and pumping lines. NW25, Right angle valve for Roughing pumping; Venting ... 2 kW (800V – 2.5A), DC Sputtering power supply, 1set; cable : M-N type. 4....

Scientific & Analytical Instruments - RF & DC Sputtering System

Vacuum Chamber is provided with 2-3 Nos. view Ports for monitoring of process. The chamber is Helium Leak Tested using Helium Leak Detector to an individual leak rate of 1 x 10-9 m.bar ltrs/sec. RF & DC Sputtering System. Pumping System: Oil Rotary Pump, Diffusion Pump, Roughing & Backing Valve, Butterfly Valve, ......